PHY 5620 Topics in Experimental Physics (Thin Film Physics and Technology) (2000-2006)

This course provides an introduction to the physical properties as well as the methods of preparation of thin films. Topi cs covered include: vacuum science and technology, thin film deposition techniques, growth processes and modes, character ization, epitaxy, lattice engineering, metastable phases, artificial structures, novel properties in thin films: supercon ductivity, giant-magnetoresistance and colossal magnetoresistance effects, modulation doping and quantum wells, superhard coatings, and transparent conducting coatings. Prerequisite: permission of the instructor.

Teacher

Prof. Wong Hong-kuen
Office: SC 208, Tel: 2609 6355, E-mail: hwong@phy.cuhk.edu.hk

Objective

To introduce the technology used in preparation of thin films with examples related to physics research.

Syllabus

Vacuum science and technology, thin film deposition techniques, growth processes and modes, characterization, epitaxy, lattice engineering, metastable phases, artificial structures, novel properties in thin films: superconductivity, giant-magnetoresistance and colossal magnetoresistance effects, modulation doping and quantum wells, superhard coatings, transparent conducting coatings.

Assessment Scheme

Homework	15%
Presentation	30%
Final exam.	55%

Course Outline

1. Introduction
thin film materials
thin film devices (1 lecture)

2. Vacuum Science and Technology
gas kinetics
pumps (4 lectures)

3. Thin film deposition
Physical vapor deposition (evaporation, sputtering,...)
Chemical vapor deposition
Industrial techniques (magnetron sputtering, cathodic arc evaporation or ion plating)
Lattice engineering (artificial structures, superlattices) (5 lectures)

4. Characterization
thickness, density, composition, structure, surface morphology, strains,... (2 lectures)

5. Thin film growth processes, epitaxy
nucleation processes, growth modes, lattice mismatch, coherency strain, epitaxial growth, metastable phases (1 week)

6. Novel physical properties
superconductivity
giant-magnetoresistance and colossal magnetoresistance effects
modulation doping and quantum wells
superhard coatings
decorating coatings
transparent conducting coatings (6.5 weeks)

References

R.K. Waits, Thin film deposition and patterning, (American Vacuum Society, 1998)

M. Ohring, The materials Science of thin films, (Academic Press, Boston, 1991). (TA418.9.T45 O47)

Ludmila Eckertova, Physics of thin films, 2nd (Plenum Press New York, 1986). (QC176.83.E2613 1986)

Kasturi L. Chopra, Thin film phenomena (McGraw-Hill, 1969). (QC176.8.T5C55)

PHY 5620 Topics in Experimental Physics (Thin Film Physics and Technology) (2000-2006)
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1.	Introduction thin film materials thin film devices	(1 lecture)
2.	Vacuum Science and Technology gas kinetics pumps	(4 lectures)
3.	Thin film deposition Physical vapor deposition (evaporation, sputtering,...) Chemical vapor deposition Industrial techniques (magnetron sputtering, cathodic arc evaporation or ion plating) Lattice engineering (artificial structures, superlattices)	(5 lectures)
4.	Characterization thickness, density, composition, structure, surface morphology, strains,...	(2 lectures)
5.	Thin film growth processes, epitaxy nucleation processes, growth modes, lattice mismatch, coherency strain, epitaxial growth, metastable phases	(1 week)
6.	Novel physical properties superconductivity giant-magnetoresistance and colossal magnetoresistance effects modulation doping and quantum wells superhard coatings decorating coatings transparent conducting coatings	(6.5 weeks)